Summary Abstract: Laser-assisted deposition of Fe and W:...

Summary Abstract: Laser-assisted deposition of Fe and W: Photodecomposition of Fe(CO)5 and W(CO)6 on Si(111)-(7×7)

Swanson, Jon R.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575107
Date:
May, 1988
File:
PDF, 466 KB
english, 1988
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