Dependences of Young’s modulus of porous silica low...

Journal of Applied Physics 2006 Vol. 100; Iss. 12

Dependences of Young’s modulus of porous silica low dielectric constant films on skeletal structure and porosity

Takada, Syozo, Hata, Nobuhiro, Seino, Yutaka, Fujii, Nobutoshi, Kikkawa, Takamaro
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Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2401660
File:
PDF, 361 KB
english, 2006
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