Direct coupling of pulsed radio frequency and pulsed high...

Review of Scientific Instruments 2008 Vol. 79; Iss. 4

Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Gong, Chunzhi, Tian, Xiubo, Yang, Shiqin, Fu, Ricky K. Y., Chu, Paul K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2906220
File:
PDF, 732 KB
english, 2008
Conversion to is in progress
Conversion to is failed