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Environmentally protected hot-stage atomic force microscope for studying thermo-mechanical deformation in microelectronic devices
Park, C., Shultz, T. E., Dutta, I.Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1809262
File:
PDF, 1.49 MB
english, 2004