Titanium implantation in bulk and thin film amorphous...

Titanium implantation in bulk and thin film amorphous silica

Tisserand, Stéphane, Flory, François, Gatto, Alexandre, Roux, Laurent, Adamik, Miklos, Kovacs, Istvan
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Volume:
83
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.367332
File:
PDF, 1.89 MB
english, 1998
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