Synthesis of β- and α-FeSi2 phases by Fe ion implantation into Si using metal vapor vacuum arc ion source
Liu, B. X., Zhu, D. H., Lu, H. B., Pan, F., Tao, K.Volume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356064
File:
PDF, 1.07 MB
english, 1994