A new technique for gettering oxygen and moisture from...

Applied Physics Letters 1982 Vol. 41; Iss. 1

A new technique for gettering oxygen and moisture from gases used in semiconductor processing

Shealy, J. R.
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Volume:
41
Year:
1982
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.93299
File:
PDF, 436 KB
english, 1982
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