[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Extendibility of NiPt Silicide Contacts for CMOS Technology Demonstrated to the 22-nm Node
Ohuchi, Kazuya, Lavoie, Christian, Murray, Conal, D'Emic, Chris, Lauer, Isaac, Chu, Jack O., Yang, Bin, Besser, Paul, Gignac, Lynne, Bruley, John, Singco, Gilbert U., Pagette, Francois, Topol, Anna W.Year:
2007
Language:
english
DOI:
10.1109/iedm.2007.4418888
File:
PDF, 2.97 MB
english, 2007