Low-temperature ion beam enhanced etching of tungsten films...

Low-temperature ion beam enhanced etching of tungsten films with xenon difluoride

Bensaoula, A., Ignatiev, A., Strozier, J., Wolfe, J. C.

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Volume:

Year:

1986

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.97260

File:

PDF, 337 KB

english, 1986

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