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Feedback-controlled ion beam sculpting apparatus
Stein, Derek M., McMullan, Ciaran J., Li, Jiali, Golovchenko, Jene A.Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1666986
File:
PDF, 1.22 MB
english, 2004