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Detailed study of the composition of hydrogenated SiN[sub x] layers for high-quality silicon surface passivation
Mäckel, H., Lüdemann, R.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1495529
File:
PDF, 377 KB
english, 2002