Effect of process parameters on stress development in...

Effect of process parameters on stress development in two-dimensional oxidation

Hu, S. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341430
File:
PDF, 1.13 MB
english, 1988
Conversion to is in progress
Conversion to is failed