Investigation of the radiation-induced thermal flexure of...

Investigation of the radiation-induced thermal flexure of an x-ray lithography mask during a tilted exposure

Nazmov, V., Reznikova, E., Mohr, J.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3524905
File:
PDF, 704 KB
english, 2011
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