Reactive atom–surface scattering: The adsorption and reaction of atomic oxygen on the Si(100) surface
Engstrom, J. R.Volume:
7
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.576011
Date:
May, 1989
File:
PDF, 564 KB
english, 1989