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Structural and elastic characterization of Cu-implanted SiO[sub 2] films on Si(100) substrates
Shirokoff, J., Young, C. K., Brits, L. C., Andrews, G. T., Johannessen, B., Ridgway, M. C.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2437690
File:
PDF, 548 KB
english, 2007