Flexible system for multiple plasma immersion ion...

Review of Scientific Instruments 2003 Vol. 74; Iss. 12

Flexible system for multiple plasma immersion ion implantation-deposition processes

Tian, Xiubo, Fu, Ricky K. Y., Chu, Paul K., Anders, Andre, Gong, Chunzhi, Yang, Shiqin
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Volume:
74
Year:
2003
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1626012
File:
PDF, 597 KB
english, 2003
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