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Effect of surface re‐emission on the surface roughness of film growth in low pressure chemical vapor deposition
Singh, Vivek K., Shaqfeh, Eric S. G.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578772
Date:
May, 1993
File:
PDF, 1.17 MB
english, 1993