Effect of surface re‐emission on the surface roughness of...

Effect of surface re‐emission on the surface roughness of film growth in low pressure chemical vapor deposition

Singh, Vivek K., Shaqfeh, Eric S. G.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578772
Date:
May, 1993
File:
PDF, 1.17 MB
english, 1993
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