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Comparison of results and models of solid-phase epitaxial growth of implanted Si layers induced by electron- and ion-beam irradiation
Lulli, G., Merli, P. G.Volume:
47
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.47.14023
Date:
June, 1993
File:
PDF, 798 KB
english, 1993