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Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors
Rousseau, A., Teboul, E., Lang, N., Hannemann, M., Röpcke, J.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1497454
File:
PDF, 438 KB
english, 2002