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[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - New methods for improved SRAM detection through scattered light collection
Barel, Reuven, Shachar, Keren, Bechler, Yakir, Horesh, Nir, Chiang, Hsien-Tsung, Chen, To-YuYear:
2011
Language:
english
DOI:
10.1109/asmc.2011.5898182
File:
PDF, 356 KB
english, 2011