Scanning nonlinear dielectric microscopy observation of accumulated charges in metal-SiO2-SiN-SiO2-Si flash memory by detecting higher-order nonlinear permittivity
Honda, Koichiro, Cho, YasuoVolume:
101
Year:
2012
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4769352
File:
PDF, 3.23 MB
english, 2012