Ion beam mass spectrometer for compositional analysis of...

Review of Scientific Instruments 1999 Vol. 70; Iss. 8

Ion beam mass spectrometer for compositional analysis of plasma assisted surface processes in the pressure range of 1–50 mbar

Kátai, Sz., Tass, Z., Bori, L., Hárs, Gy., Deák, P., Geelhaar, L.
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Volume:
70
Year:
1999
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1149912
File:
PDF, 341 KB
english, 1999
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