Optimization of the microcrystalline silicon deposition efficiency
Strahm, B., Howling, A. A., Sansonnens, L., Hollenstein, Ch.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2433985
File:
PDF, 628 KB
english, 2007