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[IEEE 2014 International Symposium on VLSI Design, Automation and Test (VLSI-DAT) - Hsinchu, Taiwan (2014.4.28-2014.4.30)] Technical Papers of 2014 International Symposium on VLSI Design, Automation and Test - Triangle-based process hotspot classification with dummification in EUVL
Wu, Po-Hsun, Chen, Che-Wen, Wu, Chr-Ruo, Ho, Tsung-YiYear:
2014
Language:
english
DOI:
10.1109/vlsi-dat.2014.6834860
File:
PDF, 563 KB
english, 2014