Scanning capacitance spectroscopy: An analytical technique...

Applied Physics Letters 1998 Vol. 72; Iss. 6

Scanning capacitance spectroscopy: An analytical technique for pn-junction delineation in Si devices

Edwards, Hal, McGlothlin, Rudye, San Martin, Richard, U, Elisa, Gribelyuk, Michael, Mahaffy, Rachel, Ken Shih, C., List, R. Scott, Ukraintsev, Vladimir A.
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Volume:
72
Year:
1998
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.120849
File:
PDF, 690 KB
english, 1998
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