Coupling effects in inductive discharges with radio...

Coupling effects in inductive discharges with radio frequency substrate biasing

Schulze, J., Schüngel, E., Czarnetzki, U.
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Volume:
100
Year:
2012
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3675879
File:
PDF, 457 KB
english, 2012
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