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Hydrogen-radical-assisted radio-frequency plasma-enhanced chemical vapor deposition system for diamond formation
Hiramatsu, Mineo, Inayoshi, Muneto, Yamada, Koji, Mizuno, Etsuko, Nawata, Masahito, Ikeda, Masanobu, Hori, Masaru, Goto, ToshioVolume:
67
Year:
1996
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1146946
File:
PDF, 725 KB
english, 1996