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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Design and Performance of Aluminum Nitride Piezoelectric Microphones
Fazzio, R. Shane, Lamers, Tina, Buccafusca, Osvaldo, Goel, Atul, Dauksher, WalterYear:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300365
File:
PDF, 777 KB
english, 2007