Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 6
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Low-energy electron-beam effects on poly(methyl methacrylate) resist films
Bermudez, V. M.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591134
File:
PDF, 385 KB
english, 1999