Low-energy electron-beam effects on poly(methyl...

Low-energy electron-beam effects on poly(methyl methacrylate) resist films

Bermudez, V. M.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591134
File:
PDF, 385 KB
english, 1999
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