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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Isotropic etching of 111 SCS for wafer-scale manufacturing of perfectly hemispherical silicon molds
Fegely, Laura C., Hutchison, David N., Bhave, Sunil A.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969536
File:
PDF, 868 KB
english, 2011