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Microstructure of Cu film sputter deposited on TiN
Furuya, Akira, Ohshita, Yoshio, Ogura, AtsuhiVolume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1310653
File:
PDF, 334 KB
english, 2000