ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL...

Applied Physics Letters 1969 Vol. 14; Iss. 7

ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION

Kurtin, Stephen
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Volume:
14
Year:
1969
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1652788
File:
PDF, 422 KB
english, 1969
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