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Modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions
Goeckner, M. J., Marquis, J. M., Markham, B. J., Jindal, A. K., Joseph, E. A., Zhou, B.-S.Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1688443
File:
PDF, 1.63 MB
english, 2004