[IEEE The Joint 30th International Conference on Infrared and Millimeter Waves - Williamsburg, VA, USA (19-23 Sept. 2005)] 2005 Joint 30th International Conference on Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics - Backside observation of MOSFET chips using an infrared laser THz emission microscope
Yamashita, M., Nikawa, K., Tonouchi, M., Otani, C., Kawase, K.Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/icimw.2005.1572705
File:
PDF, 911 KB
english, 2005