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Analysis of the chemistry in CH[sub 4]∕O[sub 2] plasmas by means of absorption spectroscopy and a simple numerical model
Möller, I., Serdyuchenko, A., Soltwisch, H.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2219001
File:
PDF, 636 KB
english, 2006