Temperature mapping of reactive gas layer in thermal plasma...

Temperature mapping of reactive gas layer in thermal plasma chemical vapor deposition

Larjo, Jussi, Walewski, Joachim, Hernberg, Rolf
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Volume:
82
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.365687
File:
PDF, 1.22 MB
english, 1997
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