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Transmission electron energy-loss spectroscopy measurements of the dielectric function of Si/SiO[sub 2] multilayers
Keränen, J., Lepistö, T., Ryen, L., Novikov, S. V., Olsson, E.Volume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.369014
File:
PDF, 574 KB
english, 1998