Reducing SS 304∕316 hydrogen outgassing to 2×10[sup −15] torr l∕cm[sup 2] s
Sasaki, Y. TitoVolume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2734151
File:
PDF, 499 KB
english, 2007