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Characterization of 100 MHz inductively coupled plasma (ICP) by comparison with 13.56 MHz ICP
Nakagawa, H., Morishita, S., Noda, S., Okigawa, M., Inoue, M., Sekine, M., Ito, K.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581845
File:
PDF, 564 KB
english, 1999