[IEEE 2012 Winter Simulation Conference - (WSC 2012) - Berlin, Germany (2012.12.9-2012.12.12)] Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC) - Modeling and wafer defect analysis in semiconductor automated material handling systems
Wagner, Thomas, Schwenke, Clemens, Kabitzsch, KlausYear:
2012
Language:
english
DOI:
10.1109/wsc.2012.6465006
File:
PDF, 838 KB
english, 2012