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Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films
Ikehara, Tsuyoshi, Tsuchiya, ToshiyukiVolume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3124368
File:
PDF, 1.06 MB
english, 2009