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A molecular dynamics model for the interaction of energetic ions with SiOCH low-κ dielectric
Smirnov, V. V., Stengach, A. V., Gaynullin, K. G., Pavlovsky, V. A., Rauf, S., Ventzek, P. L. G.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2512700
File:
PDF, 935 KB
english, 2007