Characterization of hydrogen etched 6H–SiC(0001) substrates...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 2

Characterization of hydrogen etched 6H–SiC(0001) substrates and subsequently grown AlN films

Hartman, J. D., Roskowski, A. M., Reitmeier, Z. J., Tracy, K. M., Davis, R. F., Nemanich, R. J.
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1539080
File:
PDF, 1.26 MB
english, 2003
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