Controlling defect and Si nanoparticle luminescence from silicon oxynitride films with CO[sub 2] laser annealing
Tewary, Anuranjita, Kekatpure, Rohan D., Brongersma, Mark L.Volume:
88
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2178769
File:
PDF, 322 KB
english, 2006