Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
Rowlette, Pieter C., Allen, Cary G., Bromley, Olivia B., Wolden, Colin A.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3119673
File:
PDF, 579 KB
english, 2009