Nanometer-scale linewidth fluctuations caused by polymer...

Applied Physics Letters 1997 Vol. 71; Iss. 16

Nanometer-scale linewidth fluctuations caused by polymer aggregates in resist films

Yamaguchi, Toru, Namatsu, Hideo, Nagase, Masao, Yamazaki, Kenji, Kurihara, Kenji
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
71
Year:
1997
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.120037
File:
PDF, 302 KB
english, 1997
Conversion to is in progress
Conversion to is failed