Uniform-stress tungsten on x-ray mask membranes via...

Uniform-stress tungsten on x-ray mask membranes via He–backside temperature homogenization

Mondol, Mark
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587423
Date:
November, 1994
File:
PDF, 594 KB
english, 1994
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