Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1994 / 11 Vol. 12; Iss. 6
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Uniform-stress tungsten on x-ray mask membranes via He–backside temperature homogenization
Mondol, MarkVolume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587423
Date:
November, 1994
File:
PDF, 594 KB
english, 1994