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[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - Micro-G silicon accelerometer using surface electrodes

Walmsley, Robert G, Kiyama, Lennie K, Milligan, Don M, Alley, Rod L, Erickson, David L, Hartwell, Peter G
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Year:
2009
Language:
english
DOI:
10.1109/icsens.2009.5398201
File:
PDF, 736 KB
english, 2009
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