Surface cleaning and modification of Si(100) substrates by ethanol and water cluster ion beams
Takaoka, Gikan H., Noguchi, Hidetaka, Nakayama, Kazuya, Seki, Takato, Kawashita, MasakazuVolume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2172342
File:
PDF, 350 KB
english, 2006