Electrical analysis of three-stage passivated In[sub...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 1

Electrical analysis of three-stage passivated In[sub 0.53]Ga[sub 0.47]As capacitors with varying HfO[sub 2] thicknesses and incorporating an Al[sub 2]O[sub 3] interface control layer

Monaghan, S., O’Mahony, A., Cherkaoui, K., O’Connor, É., Povey, I. M., Nolan, M. G., O’Connell, D., Pemble, M. E., Hurley, P. K., Provenzano, G., Crupi, F., Newcomb, S. B.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3532826
File:
PDF, 1.78 MB
english, 2011
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